Research: Processing Technology Research
UV Laser processing of Ga-As buffer layers and interconnects
In-situ Processing of high performance devices
- Include surface desorption for regrowth
- Multiple epitaxial depositions
- Localized epitaxy and itching
- Combined MBE growth with metal deposition
- Doping and disordering with focused ion beam
- New metalization schemes
- In-situ processing for high performance GaAs devices
- Non-Au based metalization
Selected Publications